Bias field generation for a magneto sensor

ABSTRACT

Embodiments related to the generation of magnetic bias fields for magnetic sensing are described and depicted. In one embodiment, a sensor includes at least one magnetosensitive element, and a magnetic body with an opening, the magnetic body comprising magnetic material magnetized mainly in a vertical direction, the magnetic body having inclined surface sections shaped by the opening, wherein the sensor is arranged atop the opening.

REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.14/093,567, filed on Dec. 2, 2013, which is a continuation of U.S.application Ser. No. 12/885,349, filed on Sep. 17, 2010, now U.S. Pat.No. 8,610,430, which is a continuation-in-part of U.S. application Ser.No. 12/130,571, filed on May 30, 2008, now U.S. Pat. No. 8,058,870, thecontents of which are herein incorporated by reference.

BACKGROUND

Sensors are nowadays used in many applications for monitoring, detectingand analyzing. One type of sensors includes magnetic sensors which arecapable of detecting magnetic fields or changes of magnetic fields.Magnetoresistive effects used in magnetoresistive sensors include butare not limited to GMR (Giant Magnetoresistance), AMR (AnisotropicMagnetoresistance), TMR (Magneto Tunnel Effect), CMR (ColossalMagnetoresistance). Another type of magnetic sensors is based on theHall effect. Magnetic sensors are used for example to detect position ofmoving or rotating objects, the speed or rotational speed of rotatingobjects etc.

Magnetoresistive sensors are typically sensitive to the in plane x and ycomponents of the Magnetic fields which may be herein referred to aslateral components of the magnetic fields. One component of the magneticfield which may without limitation be referred to as y-component changesthe sensitivity, whereas the other component x has a linear relation tothe resistance at low fields below for example 5 mT. This component istypically used as the sensing field component.

Typically, the magnetoresistive effect has a working range in which thesensitivity for example the change of resistance versus magnetic fieldchange is high. Outside of the working range, unfavorable behavior ofthe magnetoresistive effect such as saturation limits does not allow theuse of the sensor for many applications. The working range may also bereferred for some magnetoresistive devices as the anisotropic range. Inapplications such as for example for the detection of a rotational speedof an object, a bias magnet field is applied to the magnetoresistivesensors in order to avoid saturation of the magnetoresistive sensor.Typical examples include for example a back bias magnet arrangement. Inthe back bias magnet arrangement, the magnetic sensor is providedbetween the object to be sensed and the bias magnet.

SUMMARY

According to one aspect, embodiments include a manufacturing methodcomprising providing a bias field generator to generate a bias magneticfield having a field component in a first direction, wherein the biasfield generator comprises a body of permanent magnetic material ormagnetizable material with a cavity such that the cavity is laterallybounded by material of the body at least in a second and thirddirection, the second direction being orthogonal to the first directionand the third direction being orthogonal to the second direction and thefirst direction and arranging a magneto sensor in a part of the cavity.

According to another aspect, a method comprises rotating an object,operating a magneto sensor to sense the rotation, wherein a biasmagnetic field arrangement provides a bias field for sensing therotation, the bias magnetic field arrangement comprising a magnetic bodywith an opening, the magnetic body comprising magnetic material, theopening extending in a vertical direction and in lateral directions,wherein the opening is in lateral directions bounded by magneticmaterial of the magnetic body, wherein inclined surfaces sections of themagnetic body are shaped by the opening, wherein each of the inclinedsurface sections comprise an inclination angle between the surfacesections and at least one lateral direction in the range between 5° and20°.

According to a further aspect, a device comprises a sensor having atleast one magnetosensitive element and a magnetic body with an opening,the magnetic body comprising magnetic material, the magnetic body havinginclined surface sections shaped by the opening, wherein the sensor isarranged within the opening such that the magnetosensitive element is inlateral directions bounded by the inclined surface sections.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIGS. 1a to 1h schematic cross-sectional views of embodiments;

FIGS. 2a to 2c schematic top views of embodiments;

FIGS. 3a and 3b three-dimensional views of embodiments;

FIG. 4a a schematic view of a system according to embodiments; and

FIG. 4b a simulation showing magnetic field lines according to anembodiment.

DETAILED DESCRIPTION

The following detailed description explains exemplary embodiments of thepresent invention. The description is not to be taken in a limitingsense, but is made only for the purpose of illustrating the generalprinciples of embodiments of the invention while the scope of protectionis only determined by the appended claims.

It is to be understood that elements or features shown in the drawingsof exemplary embodiments might not be drawn to scale and may have adifferent size or different extension in one direction with respect toother elements.

Further, it is to be understood that the features described or shown inthe various exemplary embodiments may be combined with each other,unless specifically noted otherwise.

In the various figures, identical or similar entities, modules, devicesetc. may have assigned the same reference number.

Referring now to FIG. 1a , a first cross-sectional view according toembodiments is shown. The cross-sectional view is taken along a lineA-A′ at a location where the sensor is arranged. The plane shown in FIG.1a is spanned by a first axis which may herein be also referred asvertical axis or vertical direction and a second axis. The second axisis with respect to the vertical direction defined by the first axis alateral axis and may herein also be referred to as a second lateral axisor second lateral direction. The first axis may herein further on bereferred to as z-axis or z direction, the second axis may herein furtherbe referred to as y-axis or y direction.

FIG. 1a shows a device 100 having a body 102 formed of permanentmagnetic material or magnetizable material such as soft magneticmaterial or a combination of both as will be described later in moredetail. The body 102 constitutes a magnet for providing the magneticbias field for a magneto sensor 106 such as a magnetoresistive sensor.In embodiments, the magnetic bias field along the x-axis generated atthe sensor 106 may be about or above 5 mT (Milli Tesla), whereas themain bias field along the magnetization direction z may be higher than100 mT. The body 102 shown in FIG. 1a has an opening 104 in the form ofa cavity which does not completely penetrate through the body 102. Theopening shapes the geometrical form of the main surface 102 a of thebody 102 to be non-planar. In FIG. 1a , the main surface 102 a is themain surface of the body 102 which is closest to the sensor 106 whilethe main surface 102 b is the opposite main surface farther from thesensor 106.

The cavity may in embodiments include shallow cavities such as shallowindentations. An angle of inclination of the surface sections shaped bythe cavity may in one embodiment be selected from the range between 5°and 65° when taken from the x-axis. In one embodiment, the angle ofinclination may be selected between 5° and 40°. In one embodiment, theangle of inclination may be selected between 5° and 20°.

In embodiments described below in more detail, the cavity may have apyramid form, a conical form or a polyhedron form. As will be describedlater in more detail, the sensor 106 may be located completely withinthe body 102, i.e. within the maximum extensions of the body 102. Thus,in one embodiment the z-axis position of the sensor 106 may be below themaximum z-axis extension of the body 102.

The sensor 106 may comprise a semiconductor chip having at least onemagnetoresistive or Hall sensor element provided thereon. The sensor 106may have an integrated circuit included. The magnetoresistive sensingelement may be a GMR, MTR, CMR, AMR element or any other form ofmagnetoresistive sensor elements. The magnetoresistive sensor may havetwo sensing elements provided in a gradiometer arrangement. Furthermore,in one embodiment, a differential signal may be supplied from at leasttwo sensing elements for sensing an object. In one embodiment, thesensor includes a plurality of magnetoresistive sensing elementsarranged in a Wheatstone bridge configuration. In one embodiment, thesensor 106 may comprise at least one Hall effect sensing element.

As can be seen from FIG. 1a , the opening 104 of the body 102 is boundedalong the z-axis region 108 along both ends by surface sections 110 aand 110 b of the body 102. Thus, the opening 104 is at least for thez-axis region 108 surrounded in the y-direction by the surface sections110 a and 110 b.

FIG. 1b shows a cross-sectional view of the same device 100 as shown inFIG. 1a in a plane spanned by the z-axis and a x-axis at the sensorlocation. The x-axis can be considered to be a lateral axis beingorthogonal to the z-axis and y-axis. As can be seen from FIG. 1b , theopening 104 of the body 102 is bounded, at least for a z-axis region108, also in the direction of the x-axis by surface sections 110 c and110 d. Thus, the opening 104 is at least for the z-axis region 108surrounded by the surface sections 110 c and 110 d in the x-direction.

In some embodiments, the opening 104 may be filled with other materialsuch as mold material which is neither magnetic nor magnetizable.

It can be seen from the cross-section of FIG. 1a that the lateral widthof the opening 104 in the direction of the y-axis decreases when movingin the vertical direction away from the sensor 106. Furthermore, it canbe seen from the cross-section of FIG. 1b that the lateral width of theopening 104 in the direction of the x-axis decreases when moving in thevertical direction away from the sensor 106. In other words, thecross-sectional views of FIGS. 1a and 1b show a forming of the body 102such that the surface 102 a of the body 102 has a tapered shape in thevertical direction away from the sensor 106.

While FIGS. 1a and 1b show the overall surface 102 a with the surfacesections 110 a, 110 b 110 c and 110 d as having a non-orthogonalinclination with respect to the y-axis or x-axis, respectively, it is tobe understood that the main surface 102 a may in other embodiments havein addition one or more sections which are parallel to the x-axis.

Providing the main surface 102 a such that an opening 104 is formedallows an independent two-dimensional shaping of the magnetic fieldgenerated by the body 102 which provides the bias field for the sensor106 with reduced or zero lateral field components in the x- andy-directions.

In FIGS. 1a and 1b , the bias field for the sensor 106 is to be appliedin the z-direction. Therefore, the magnetization direction of the body102 is provided substantially in the z-direction. The working pointwhere the sensor 106 is most sensitive is when both lateral componentsof the magnetic field, i.e. the x- and y-components are zero. Howeverfor small sizes of the body 102, due to the nature of magnetic fieldlines only appearing in closed loops, a plane extension of the surface102 a as for example for a cubic form of the body 102 with themagnetization in the z-direction would produce at the location of thesensor 106 a magnetic field with significant lateral field components inthe x- and y-directions. When the size of the body 102 is small such asfor example when the body 102 and the sensor 106 are integrated, themagnetic field lines returning in the space outside of the body 102effect a significant curvature of the field lines from to z-directiontowards the lateral directions at the location of the sensor 106. Thelateral component of the magnetic field lines is with a cubic biasmagnet of typical dimensions so strong that for example the fieldstrength in the y component could cause the sensitivity to be decreasedby a factor of 4 in case of GMR sensors.

The opening 104 in the body 102 addresses the avoiding of lateral fieldcomponents and provides a reshaping of the field such that at thelocation of the sensor 106 the lateral components of the magnetic fieldat least in the x-direction and the y-direction are zero or reduced toalmost zero.

Since the opening 104 is laterally bounded by permanent magnetic ormagnetisable material of the body 102 at least in both the x-directionas well as the y-direction, the x-component and the y-component of themagnetic field are shaped. In particular, the x-components andy-components can be shaped independently from each other by the shape ofthe opening 104. This allows independent controlling of the magnetic x-and y-components by geometric shapes of the surface to reduce oreliminate the lateral field components caused by the effect of a smallbody size simultaneously at least for these two lateral dimensions.Independent controlling of the magnetic x- and y-components can beobtained for example by providing in the manufacturing processrespectively different inclinations for the opening 104 in thex-direction and in the y-direction. Independent controlling provides theadvantage to address that the influence of the magnetic field to thecharacteristic of the sensor 106 is different for the x-direction andthe y-direction. The independent controlling allows increasing theregion of zero lateral field components thereby relieving the need forextreme accurate positioning of the sensor 106 with respect to the body102 and further to increase the sensitivity of the sensor 106 byproviding exactly the magnetic field needed for maximum operation.However it is to be noted, that in some embodiments the sensor 106 mightnot be operated at the maximum sensitivity, i.e. off-centered from thecenter where maximum sensitivity is obtained. This can in a convenientway be achieved by sliding the sensor 106 along one of the lateral x- ory-direction as will be described later on in more detail.

In some embodiments, the opening 104 may be bounded by the body 102 atleast within the vertical region where the sensor 106 is located.Furthermore, in embodiments, the opening 104 may be laterally bounded bythe body 102 also for vertical regions which extend beyond the sensorlocation. Furthermore, in embodiments, the opening 104 may be completelysurrounded by material of the body 102.

With the above described embodiments, the usage of a bias magnet of bigsize can therefore be avoided and it is possible to keep both the sensor106 and the body 102 small without having degradation in the performanceor sensitivity of the sensor 106. Furthermore, the region where a zerolateral field component or a lateral field component close to zero isobtained can be increased which might relax the requirement for extremeaccurate positioning of the sensor 106 for maximum sensitivity. In someembodiments, such a region may have an extension in the x-direction fromabout ⅛ to ½ of the maximum extension of the cavity in the x-direction.Further, this region may have simultaneously an extension in they-direction from about ⅛ to about ½ of the maximum extension of thecavity in the y-direction.

Thus compared to the usage of large bias magnets, a price advantage canbe achieved and the dimensions of device 100 can be kept small. In oneembodiment, the body 102 has lateral dimensions in the x- andy-direction smaller than 15 mm. In one embodiment, the body 102 haslateral dimensions in the x- and y-direction smaller than 10 mm. In oneembodiment, the body 102 has lateral dimensions in the x- andy-direction smaller than 7.5 mm. The dimension of the body 102 inz-direction may in some embodiments be smaller than 10 mm. The body 102may for example have a rectangular or cubic form where the extension ineach of the x-, y- and z-dimensions is not shorter than ½ of the maximumof the extensions in the x-, y- and z-dimensions of the body 102.

While FIGS. 1a and 1b show the body 102 being completely formed ofpermanent magnetic material such as hard magnetic material, FIGS. 1c and1d show a further embodiment wherein the body 102 is composed of a part202 a formed of magnetizable material and a part 202 b formed ofpermanent magnetic material. Part 202 a has a plate form with a smallervertical extension than part 202 b. However, other embodiments may haveother forms and shapes of parts 202 a and 202 b. The magnetizablematerial of part 202 a may be soft magnetic material such as iron,steel, steel alloy etc. The magnetic material provides the magnetizationfor the magnetizable material such that the part 202 a is capable ofgenerating the bias magnetic field for the sensor 106. It can be seenthat in the embodiments of FIGS. 1c and 1d , the opening 104 is formedonly in the part 202 a. However, in other embodiments the opening 104may partially be formed also in the part 202 b. Furthermore, it is to benoted that in other embodiments, multiple parts of magnetisable materialand multiple parts of magnetic material may be included to form acomposite body 102.

In the embodiments of FIGS. 1a to 1d , the sensor 106 is arranged withrespect to the vertical direction (z-axis) such that the sensor 106 iswithin the body 102. In other words, the sensor 106 is laterally boundedat least in the x- and y-direction by the body 102.

FIG. 1e shows an embodiment, wherein the sensor 106 is placed in thex-direction atop of plane surface portions 112 a and 112 b. The planesurface portions 112 a and 112 b are provided at the lateral border ofthe body 102.

FIG. 1f shows a further embodiment wherein the body 102 comprises in thex-direction two opposing protrusions 114 a and 114 b. The protrusions114 a and 114 b which are located at the respective lateral ends providea rim or “border ears” for the body 102 allowing a more effectiveshaping of the x-component of the magnetic field and providing increasedlinearity to the magnetic field. The protrusions being placed at theborder or border area results in having a maximum extension of the body102 at the border or a local region near the border. The protrusions 114a and 114 b may also form a lateral fixation or support for holding andkeeping the sensor device 106 in place in the lateral direction.Protrusions 114 a and 114 b may also be provided for keeping theposition of the sensor 106 in the y-direction. However, in oneembodiment, the protrusions 114 a and 114 b may only be provided suchthat the sensor 106 can be slide along the y-direction at least from oneside into the body 102.

FIG. 1g shows a further embodiment in which the protrusions 114 a and114 b have a crane-like form with overhanging surfaces. The crane-likeform of the protrusions 114 a and 114 b in FIG. 1g allows obtaining aneven more increased linearity of the magnetic field and therefore a moreeffective shaping of the magnetic field. In addition to providing a moreeffective shaping with higher linearity of the magnetic field, thesynergetic effect of a positional fixation in the x-direction as well asa positional fixation in the vertical direction is obtained. Thepositional fixations may be advantageously used for example during amolding step in which the sensor 106 and the magnet are together overmolded with mold material to obtain a protection for the sensor 106 andthe body 102.

FIG. 1h shows an embodiment wherein the opening 104 penetrates in thevertical direction throughout the whole body 102 to form a hole in thebody 102. The sensor 106 is placed in the embodiment according to FIG.1h completely within the body 102. FIG. 1h shows the opening 104 to havean inclined surface with respect to the vertical direction such that thewidth in x-direction increases towards the sensor 106. However, otherembodiments may provide other inclinations or no inclination withrespect to the vertical direction.

Having now described cross-sectional views of embodiments, FIGS. 2a to2c show exemplary top views which may apply to each of the embodimentsdescribed with respect to FIGS. 1a to 1 h.

FIG. 2a shows a top-view of the body 102 wherein the opening 104 has apyramid shape or a shape of half of an octahedron. A three-dimensionalview of the pyramid-shape when provided in an embodiment described withrespect to FIG. 1e is shown in FIG. 3a . Furthermore, athree-dimensional view of the pyramid shape when applied to anembodiment having a protrusion at a lateral border as described withrespect to FIG. 1g is shown in FIG. 3 b.

While FIG. 2a shows the pyramid shape in top-view to have a quadraticform, it may be noted that also a rectangle form with extensions in xand y-direction being different may be provided in embodiments.

FIG. 2b shows a top-view of the body 102 wherein the opening 104 has theshape of one half of a polyhedron with 16 surfaces. In embodiments, theopening 104 may have the form of regular polyhedrons or parts of regularpolyhedrons.

FIG. 2c shows a top-view of the body 102 according to a furtherembodiment where the opening 104 has a circular form with decreasingradius when moved along the vertical line. FIG. 2c shows the opening 104in the form of a cone. In a further embodiment, the opening 104 may havethe form of a truncated cone.

Each of the top view forms shown and described with respect to FIGS. 2ato 2c may be have one of the cross-sectional views shown and describedwith respect to FIGS. 1a to 1h . For example, the protrusions shown inFIGS. 1f and 1g may be provided for the pyramid shape as shown anddescribed with respect to FIG. 2a , for the polyhedron shape as shownand described with respect to FIG. 2b or for the cone shape as shown anddescribed with respect to FIG. 2 c.

Each of the embodiments shown in FIGS. 2a to 2c has in the x-y plane asymmetric structure with a defined center of symmetry. For suchstructures, the region of zero or substantially zero magnetic x- andy-components includes the center of symmetry. However, other embodimentsmay have a non-symmetric structure when viewed from the top.

In one embodiment, the body 102 forming the bias magnet for the sensor106 can be manufactured by molding hard magnetic and/or soft magneticmaterial. The molding of the body 102 with its geometrical shape can bedone with mold tools directly on top of the sensor 106 as an additionalpackaging step. In some embodiments, the body 102 and the sensor 106 maybe integrated. In some embodiments, the body 102 and the sensor 106 maybe integrated within a common package which may be formed by moldingover the body 102 and the sensor 106. In some embodiments, the body 102can be assembled on the sensor 106 with the usage of adhesive glues oronly with mechanical clamping mechanism. In some embodiments, the body102 can be assembled with the sensor 106 and fixed with a mold materialthat is molded around the whole system for example in a thermoplastinjection mold process.

An embodiment showing an exemplary operation of the sensor 106 biased bythe body 102 will now be described with respect to FIG. 4 a.

FIG. 4a shows a system 400 having the sensor 106 arranged near a rotaryelement 402 for detecting a rotation of the element 402. The system 400is provided in a back bias manner with the sensor 106 arranged betweenthe body 102 generating the bias magnet field and the rotary element402. While the body 102 shown in FIG. 4a corresponds to the arrangementshown in FIG. 1g , it is apparent that each of the described embodimentscan also be implemented.

The sensor 106 may be provided centered in the region with zero x- andy-field components for obtaining maximum sensitivity. In otherembodiments, the sensor 106 may be off-centered or outside the regionwith zero x- and y-field components in order to reduce the sensitivity.This may for example be achieved by having the sensor 106 moved awayfrom the region with zero x- and y-component along the guide or supportformed by protrusions 114 a and 114 b.

As can be seen from FIG. 4a , the rotary element 402 is capable torotate such that the axis of the rotation is directed in they-direction. The rotary element 402 has a plurality of magnets 404 withalternating magnetization provided at a surface of the rotary element402. When the rotary element 402 rotates, the magnetic field generatedby the magnets 404 is applied to the sensor 106. The sensor 106 has thesensing direction along the x-direction. The sensor 106 experiences achange of the direction of the x-component of the magnetic field whichis detected by the sensor 106 having its sensing direction in thex-direction. The bias magnetic field generated by the body 102 providesthe sensor 106 at a working point to avoid saturation and/or otheradverse effects.

FIG. 4b shows an exemplary simulation of the magnetic field generated byan arrangement similar to FIG. 1g with a moving element 408 comprisingmagnetic permeable material. It can be seen that the body 102 generateswithin a region 406 substantially zero x- and y-field components withinthe body 102. It can be seen that the region 406 extends lateral overmore than half of the size of the opening 104. As described above, thesensing elements of the sensor 106 may provided to be within the region406 to obtain maximum sensitivity or outside of the region 406 to obtaina reduced sensitivity by purpose.

In the above description, embodiments have been shown and describedherein enabling those skilled in the art in sufficient detail topractice the teachings disclosed herein. Other embodiments may beutilized and derived there from, such that structural and logicalsubstitutions and changes may be made without departing from the scopeof this disclosure.

This Detailed Description, therefore, is not to be taken in a limitingsense, and the scope of various embodiments is defined only by theappended claims, along with the full range of equivalents to which suchclaims are entitled.

Such embodiments of the inventive subject matter may be referred toherein, individually and/or collectively, by the term “invention” merelyfor convenience and without intending to voluntarily limit the scope ofthis application to any single invention or inventive concept if morethan one is in fact disclosed. Thus, although specific embodiments havebeen illustrated and described herein, it should be appreciated that anyarrangement calculated to achieve the same purpose may be substitutedfor the specific embodiments shown. This disclosure is intended to coverany and all adaptations or variations of various embodiments.Combinations of the above embodiments, and other embodiments notspecifically described herein, will be apparent to those of skill in theart upon reviewing the above description.

It is further to be noted that embodiments described in combination withspecific entities may in addition to an implementation in these entityalso include one or more implementations in one or more sub-entities orsub-divisions of said described entity.

The accompanying drawings that form a part hereof show by way ofillustration, and not of limitation, specific embodiments in which thesubject matter may be practiced.

In the foregoing Detailed Description, it can be seen that variousfeatures are grouped together in a single embodiment for the purpose ofstreamlining the disclosure. This method of disclosure is not to beinterpreted as reflecting an intention that the claimed embodimentsrequire more features than are expressly recited in each claim. Rather,as the following claims reflect, inventive subject matter lies in lessthan all features of a single disclosed embodiment. Thus the followingclaims are hereby incorporated into the Detailed Description, where eachclaim may stand on its own as a separate embodiment. While each claimmay stand on its own as a separate embodiment, it is to be notedthat—although a dependent claim may refer in the claims to a specificcombination with one or more other claims—other embodiments may alsoinclude a combination of the dependent claim with the subject matter ofeach other dependent claim. Such combinations are proposed herein unlessit is stated that a specific combination is not intended.

It is further to be noted that methods disclosed in the specification orin the claims may be implemented by a device having means for performingeach of the respective steps of these methods.

What is claimed is:
 1. A manufacturing method comprising: providing abias field generator to generate a bias magnetic field having a fieldcomponent in a first direction, wherein the bias field generatorcomprises a body of permanent magnetic material or magnetizable materialmagnetized mainly in the first direction which is a vertical directionand with a cavity such that the cavity is laterally bounded in a seconddirection by first and second inclined surface sections of the body andin third direction by third and fourth inclined surface sections of thebody, the second direction being orthogonal to the first direction andthe third direction being orthogonal to the second direction and thefirst direction; and arranging a magneto sensor atop the cavity.
 2. Themethod according to claim 1, wherein the body is formed by molding. 3.The method according to claim 1, wherein an inclination angle between arespective inclined surface section and at least one lateral directionis in the range between 5° and 20°.
 4. The method according to claim 1,wherein the body is formed such that a magnetic field generated by themagnetic body is shaped to provide, at least within a local region,lateral magnetic field components to be substantially zero.
 5. Themethod according to claim 1, wherein a package is formed by moldingaround the magneto sensor and the body.
 6. A method comprising: rotatingan object; operating a magneto sensor to sense the rotation, wherein abias magnetic field arrangement provides a bias field for sensing therotation, the bias magnetic field arrangement comprising a magnetic bodywith an opening, the magnetic body comprising magnetic material, theopening extending in a vertical direction and in lateral directionsbounded by inclined surface sections of the magnetic body, wherein theopening is in lateral directions bounded by magnetic material of themagnetic body, wherein the magneto sensor is arranged atop the opening,wherein each of the inclined surface sections comprises an inclinationangle between the surface sections and at least one lateral direction inthe range between 5° and 20°, and wherein the magnetic body ismagnetized mainly in the vertical direction, wherein the magneto sensoras a maximum sensitivity in at least one lateral direction and whereinlateral field components of the magnetic field generated by the magneticbody are substantially zero within a local region around the location ofthe magneto sensor.
 7. The method according to claim 6, wherein theopening is a cavity.
 8. A device comprising: a sensor comprising atleast one magnetosensitive element; a magnetic body with an opening, themagnetic body comprising magnetic material, the magnetic body havinginclined surface sections shaped by the opening, wherein the sensor isarranged atop the opening, and wherein the sensor has a maximumsensitivity in at least one lateral direction, and wherein the body ismagnetized mainly in the vertical direction.
 9. The device according toclaim 8, wherein lateral field components of the magnetic fieldgenerated by the magnetic body are substantially zero at least within alocal region in which the at least one magnetosensitive element islocated.
 10. The device according to claim 8 wherein an inclinationangle between each of the inclined surface sections and at least onelateral direction is in the range between 5° and 20°.
 11. The deviceaccording to claim 8, wherein the opening is a cavity.